Materials Science in Microelectronics v 2,
2005
:
The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: • Electrical properties • Magnetic properties • Optical properties • Mechanical properties • Mass transport properties • Interface and junction properties • Defects and properties
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